Thin film growth & modelling 6
10 June 2026
Conferences, Oral
GROM
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GROM 6
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15:50
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16:50
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Thin film growth & modelling 6
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Auditorium
GROM
15:50
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GROM6-O1-052
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Wafer-level extraction of thin film residual stress for mems applications via cantilever analysis
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A.
Alice
Todeschini (Milano)
16:10
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GROM6-O2-169
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Bipolar HiPIMS pulse configurations for energy-flux-controlled growth of AlN semiconductor thin films
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M.
Mina
Farahani (Pilsen)
16:30
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GROM6-O3-115
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Model-based optical critical dimension metrology of anamorphic distortion in high-aspect ratio holes
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J.
József
SZENKA (Budapest)
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